Synthesis of High-Quality Large-Area Homogenous 1T' MoTe2 from Chemical Vapor Deposition.

High-quality large-area few-layer 1T' MoTe2 films with high homogeneity are synthesized by the controlled tellurization of MoO3 film. The Mo precursor plays a key role in determining the quality and morphology of the 1T' MoTe2 . Furthermore, the amount of Te strongly influences the phase of the MoTe2 . The growth method paves the way toward the scalable production of 1T' MoTe2 -based applications.